Effect of deposition Conditions on Electrical Conductivity of ZnO Deposits by chemical vapor deposition (CVD).

ABSTRACT ZnO thin films on glass substrate were prepared by chemical vapor deposition (CVD) using zinc acetate as a starting material. Electrical properties of the films deposited at various substrate temperatures and sample position inside the chamber were investigated. Maximum conductivity is obtained for the film deposited at 550C and at a position 16 cm far from the inlet side of the gases.